| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration damping device for suppressing vibration in the horizontal direction of a machine without increasing the mass of the machine. SOLUTION: The vibration damping device comprises a base on which a movable mechanism M consisting of a movable table 1 and a driving system 2 is mounted and legs 6 as first springs for elastically supporting the base on a floor. The base consists of an upper base 3 on which the movable mechanism M is mounted and a lower base 4 joined between it and the floor 5 via the legs 6, and coil springs 9 as second springs are provided between the upper base 3 and the lower base 4 for elastically supporting the bases. COPYRIGHT: (C)2005,JPO&NCIPI |
