| 摘要 |
PROBLEM TO BE SOLVED: To provide an illumination optical system that improves a light intensity distribution on an illuminated surface and that improves light quantity loss and the lowering of the throughput. SOLUTION: The illumination optical system, which uses a practically incoherent beam from a light source section to illuminate a surface to be illuminated, is composed of a first optical element whose cross-section perpendicular to the optical axis is formed by plural first sides, and has a first light integrator for evenly illuminating the illuminated surface and a second light integrator for evenly illuminating the first integrator using a practically incoherent beam from the light source. The outlines of the first light integrator's illumination range at the plane of incidence are composed of multiple second sides, each of which is not parallel with respect to any of the first sides. COPYRIGHT: (C)2005,JPO&NCIPI
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