ATMOSPHERIC GAS FEED DEVICE AND HEAT TREATMENT APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To uniformize the flow of atmosphere gas in a treatment apparatus. SOLUTION: This atmospheric gas feed device 6 comprises a gas feed pipe 11 inserted into the body 2 of the heat treatment apparatus 1 and a gas feed source 12 feeding atmospheric gas to the gas feed pipe 11. The gas feed pipe 11 comprises a plurality of jetting ports 11a along the longitudinal direction thereof. Also, a partition 11b dividing the inside of the gas feed pipe 11 into one end side and the other end side is installed at the longitudinal center part of the gas feed pipe 11. A first flow control valve 13a is installed between one end of the gas feed pipe 11 and the gas feed source 12, and a second flow control valve 13b is installed between the other end of the gas feed pipe 11 and the gas feed source 12. COPYRIGHT: (C)2005,JPO&NCIPI