| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of producing carbon nanotube by which a carbon nanotube can be formed on a substrate at a low temperature and at a low cost, and to provide a method of producing a carbon nanotube using the substrate. SOLUTION: On the substrate 1, a first metal 5 causing the thermal movement of atoms at a temperature lower than the melting point of a substrate 1 (the softening point of glass in the case of a glass substrate), and a catalyst metal (second metal) 3, are laminated. By the thermal movement of the atoms by the heating for the atoms of the first metal 5, or the fluidization thereof by melting, the catalyst metal 3 itself or the part of the catalyst metal 3 to be the nuclei of CNT (carbon nano tube) growth is finely dispersed or exposed to the surface of the substrate 1, so that the substrate for CNT formation provided with the fine nuclei of the catalyst metal 3 promoting CNT growth is produced, and a CNT is grown on the substrate by a thermal CVD (chemical vapor deposition) method. COPYRIGHT: (C)2005,JPO&NCIPI
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