HEATER FOR SEMICONDUCTOR MANUFACTURING AND INSPECTING EQUIPMENT

摘要

A ceramic heater for semiconductor manufacturing and inspecting equipment having excellent temperature increase and decrease characteristics, a strong thermal shock in heating and cooling, and excellent uniformity of temperature on a heated surface, comprising heating elements installed on one surface of or inside a substrate, wherein the substrate is formed of a plurality of plate-like segments combined with bar-like segments in circular shape, and heating patterns are provided on the segments independently of each other.