发明名称 TREATMENT METHOD FOR ZINC OXIDE FILM AND METHOD FOR MANUFACTURING PHOTOVOLTAIC ELEMENT USING SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a means for electrically obtaining a low-resistance zinc oxide film without deteriorating the light transmissivity of the zinc oxide film by its processing method in the zinc oxide film electrochemically precipitated from an aqueous solution. <P>SOLUTION: The zinc oxide film electrochemically precipitated from the aqueous solution is heated at a temperature not lower than 150°C and not higher than 400°C in an N<SB>2</SB>atmosphere containing oxygen or in an inactive gas atmosphere. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2004289034(A) 申请公布日期 2004.10.14
申请号 JP20030081785 申请日期 2003.03.25
申请人 CANON INC 发明人 IWATA MASUMITSU;TOYAMA JO;HAYASHI SUSUMU;NISHIMOTO TOMONORI;KONDO TAKAHARU;YAMADA SATOSHI;SONODA YUICHI;MIYAMOTO YUSUKE
分类号 H05H1/46;B01J19/08;C23C16/505;C25D5/50;C25D9/04;C25D9/08;H01L21/3065;H01L21/31;H01L31/00;H01L31/0216;H01L31/04;H01L31/052;H01L31/18;(IPC1-7):H01L31/04 主分类号 H05H1/46
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