发明名称 |
TREATMENT METHOD FOR ZINC OXIDE FILM AND METHOD FOR MANUFACTURING PHOTOVOLTAIC ELEMENT USING SAME |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a means for electrically obtaining a low-resistance zinc oxide film without deteriorating the light transmissivity of the zinc oxide film by its processing method in the zinc oxide film electrochemically precipitated from an aqueous solution. <P>SOLUTION: The zinc oxide film electrochemically precipitated from the aqueous solution is heated at a temperature not lower than 150°C and not higher than 400°C in an N<SB>2</SB>atmosphere containing oxygen or in an inactive gas atmosphere. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
申请公布号 |
JP2004289034(A) |
申请公布日期 |
2004.10.14 |
申请号 |
JP20030081785 |
申请日期 |
2003.03.25 |
申请人 |
CANON INC |
发明人 |
IWATA MASUMITSU;TOYAMA JO;HAYASHI SUSUMU;NISHIMOTO TOMONORI;KONDO TAKAHARU;YAMADA SATOSHI;SONODA YUICHI;MIYAMOTO YUSUKE |
分类号 |
H05H1/46;B01J19/08;C23C16/505;C25D5/50;C25D9/04;C25D9/08;H01L21/3065;H01L21/31;H01L31/00;H01L31/0216;H01L31/04;H01L31/052;H01L31/18;(IPC1-7):H01L31/04 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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