| 摘要 |
PROBLEM TO BE SOLVED: To provide a process for fabricating a ferroelectric capacitor having good characteristics. SOLUTION: The process for fabricating a ferroelectric capacitor consisting of a first electrode 20, a ferroelectric film 30, and a second electrode 40 comprises a step for performing heat treatment after the second electrode 40 is formed at least on the ferroelectric film 30, and a step for performing polarization of the ferroelectric film 30 by applying a specified voltage at least between the first electrode 20 and the second electrode 40. COPYRIGHT: (C)2005,JPO&NCIPI
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