摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device for highly precisely measuring a resistance value. <P>SOLUTION: Recessed parts 14a and 14b are formed on an insulating substrate 11. Conductive paste in predetermined shape is printed so that the recessed pars 14a and 14b can be packed. Then, conductive paste is burnt, and electrodes 13a and 13b arranged in the recessed parts 14a and 14b and a thick film-shaped resistor 12 formed across those electrodes 13a and 13b are formed. The electrodes 13a and 13b formed in the recessed parts 14a and 14b are made accordingly thicker than the resistor 12, and the sheet resistances of the electrodes 13a and 13b are smaller than the sheet resistance of the resistor 12. Therefore, when the resistance value of the resistor 12 is measured by bringing a probe contact with the electrodes 13a and 13b, the measured value can be prevented from being largely affected by the fluctuation of the contact position. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |