| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a cost is increased and a place is required for storage since the size of a substrate is restricted in a conventional rack for washing the substrate and a separate rack for washing the substrate must be prepared in order to wash the substrates having different sizes, and to provide the rack for washing the substrate capable of coping with various sizes of the substrates by one device by making a rack part for fixing the substrate and a base part adjustable and requiring no increase of the cost since it is not required that a plurality of washing racks are prepared to fit to the size of the substrates. SOLUTION: The constitution of the rack for washing the substrate comprises the rack part for clamping the substrate to be washed and fixing at front and rear sides; a frame body part having a movable base becoming the base for the substrate to be washed and fixing it at the inside; and left/right hangers mounted to an upper part of the frame body part and becoming a hanging part when it is pulled up by a hanging up tool. COPYRIGHT: (C)2005,JPO&NCIPI |
