| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measurement method and a shape measuring apparatus that can correct the large part of an error by temperature drift by data processing, and settles the error without accompanying an increase in costs, such as the remodeling of the apparatus and the extension of measurement time. SOLUTION: In the three-dimensional shape measurement method for outputting the shape of a surface to be measured, height in the z-axis direction of a surface to be measured is successively measured by scanning an x-y plane. The three-dimensional shape measurement method includes a coordinates data acquisition process for measuring a surface shape so that a first locus 31 crosses second to n-th loci on the x-y plane; an intersection calculation process for obtaining an intersection on the x-y plane with the first locus 31 for the locus of the i-th-locus (i=2-n); a difference calculation process of coordinates (z) for obtaining the difference of coordinates (z) between the first locus 31 and the i-th locus for all intersections; and a coordinates correction process for correcting the i-th locus coordinates data from the difference of each coordinates (z), obtained in the difference calculation process of coordinates (z). COPYRIGHT: (C)2005,JPO&NCIPI
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