| 摘要 |
<p>A wafer transportation system for effectively transporting wafers to a processing device. Two rails are vertically and parallelly arranged on inner sidewalls of a tunnel. The two rails each can support wafer transportation vehicles, and the vehicles drive along the rails by the drive of a motor. The tunnel has in its inside a first transportation path for transporting wafers and a second transportation path for transporting, above the first transportation path, wafers.</p> |
