| 摘要 |
PROBLEM TO BE SOLVED: To form a fine pattern having a high aspect ratio by combining and using a nano-printing method using a light-transmissive stamper and a positive resist. SOLUTION: In a light transmissive nano-stamping method in which a substrate and the stamper, in which fine irregularities are formed on the surface, are pressed for forming a fine structure on the substrate and the rear of the stamper is irradiated with light, the method contains a process in which a positive resist layer is formed on the substrate, a process in which the light-transmissive stamper is pressed against the positive resist layer on the substrate and the resist layer is deformed, a process, in which the rear of the stamper is irradiated with light, and a process in which the resist is developed and solubilized partially. COPYRIGHT: (C)2005,JPO&NCIPI |
