CARRYING MECHANISM USING WIRE MATERIAL, HEAT TREATMENT FURNACE AND HEAT TREATMENT METHOD USING THE MECHANISM

摘要

PROBLEM TO BE SOLVED: To normally carry residual heated articles by preventing the affection of the cracked heated articles even if cracking occurs in the heated articles such as substrates during carrying in a heat treatment furnace having a heat capacity reduced to a level equal to or less than that of a conventional walking beam. SOLUTION: A carrying mechanism is used to carry the plurality of heated articles in order in the heat treatment furnace for heat-treating the heated articles. The mechanism has a wire material 5 installed to be moved relative to the heat treatment furnace and carries the heated articles 5 by placing the heated articles 10 on the wire material 5 and moving the wire material 5. COPYRIGHT: (C)2005,JPO&NCIPI