METHOD FOR INCREASING WEAR RESISTANCE OF METAL PRODUCTS USING PLASMA ION IMPLANTATION METHOD

摘要

PURPOSE: A method for increasing wear resistance of the metal products using plasma ion implantation method is provided in which life cycle of the metal products is more than doubled by improving wear resistance of metal products such as tools or precision metal molds for processing printed circuit boards. CONSTITUTION: In a method for increasing wear resistance of the metal products by implanting plasma ion into the surface of metal products, the method comprises a step of positioning the metal product(1) on a support(50) in vacuum chamber(10); a step of forming the vacuum state in the vacuum chamber, and cleaning the metal product by plasma etching the surface of the metal product; a step of implanting gas ions(32) into the surface of the cleaned metal product by operating a gas plasma source(30); a step of implanting metal ions(42) into the surface of the gas ion implanted metal product by operating a metal plasma source(40); a step of generating mixed ions of gas and metal by simultaneously operating the gas plasma source and metal plasma source; a step of coating the mixed ions on the surface of the metal product; and a step of releasing the vacuum state in the vacuum chamber, and extracting the metal product, wherein the method further comprises a step of positioning a grid(60) with being spaced apart from the metal product in a certain distance to prevent damage of a sharp part of the metal product after the metal product positioning step, wherein the mixed ion generating step and the mixed ion coating step are performed two or more times, and wherein the method further comprises a step of implanting the gas ions, the metal ions or the mixed ions into the surface of a layer formed by the mixed ion coating step after performing the mixed ion coating step.