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发明名称
NEGATIVE DEEP ULTRAVIOLET PHOTORESIST
摘要
申请公布号
EP1466215(A1)
申请公布日期
2004.10.13
申请号
EP20030704351
申请日期
2003.01.03
申请人
CLARIANT INTERNATIONAL LTD.
发明人
KUDO, TAKANORI;PADMANABAN, MUNIRATHNA;DAMMEL, RALPH, R.;TOUKHY, MEDHAT, A.
分类号
C08F32/08;G03F7/004;G03F7/033;G03F7/038;G03F7/38;H01L21/027;(IPC1-7):G03F7/038
主分类号
C08F32/08
代理机构
代理人
主权项
地址
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