A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting mictostructure comprises a body portion and a nanotube embedded in the body portion.
申请公布号
EP1466333(A1)
申请公布日期
2004.10.13
申请号
EP20020781555
申请日期
2002.11.21
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CROSS, GRAHAM;DESPONT, MICHEL;DUERIG, URS, T.;GENOLET, GREGOIRE;SCHLITTLER, RETO;VETTIGER, PETER