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发明名称
CMP SYSTEMS AND METHODS UTILIZING AMINE-CONTAINING POLYMERS
摘要
申请公布号
EP1465957(A1)
申请公布日期
2004.10.13
申请号
EP20030731907
申请日期
2003.01.13
申请人
CABOT MICROELECTRONICS CORPORATION
发明人
MOEGGENBORG, KEVIN.J;CHERIAN, ISAAC K.;BRUSIC, VLASTA
分类号
B24B37/00;C09G1/02;C09K3/14;H01L21/304;(IPC1-7):C09G1/02
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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