| 摘要 |
<p>Device for the measurement of thickness changes as well as changes of the physicochemical characteristics of thin layers. The system consists of a preferably monochromatic source of light, a scanning mirror, a preferably on one side metallized prism and a photodetector array. The thin layer is irradiated with light at different angles through the prism by means of the scanning mirror. The reflected image of the layer shows with certain incidence angles when choosing a suitable wavelength, polarization and if needed the metal and the film thickness, resonance-caused intensity fluctuations, by which the layer thickness and refractive index can be calculated.</p> |
