发明名称 |
Test probe alignment apparatus |
摘要 |
A test probe alignment apparatus includes a rotatable ? stage that is decoupled from a workpiece positioning stage so that the workpiece positioning stage can move a workpiece in an X?Y plane without moving the ? stage, thereby inhibiting vibration in and inertia of the workpiece positioning stage, and improving the speed and accuracy of workpiece movements. The ? stage is driven for rotation about an axis substantially perpendicular to the X-Y plane. The rotatable stage supports a carriage adapted for holding a probe card. The carriage rotates in concert with the ? stage to thereby align the probe card relative to the workpiece. A Z-stage is operatively engaged with the carriage for moving the carriage along the axis of rotation relative to the workpiece. A computer processor performs coordinate transformations on preprogrammed movement vectors, to adjust for angular misalignment of the workpiece as measured by a position sensor. |
申请公布号 |
GB2400447(A) |
申请公布日期 |
2004.10.13 |
申请号 |
GB20040016819 |
申请日期 |
2003.03.21 |
申请人 |
* ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
KYUNG Y * KIM |
分类号 |
G01R1/06;G01R31/28;H01L21/66;(IPC1-7):G01R1/073 |
主分类号 |
G01R1/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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