发明名称 WAFER CARRIER DOOR AND LATCHING MECHANISM
摘要 A wafer container, and methods of constructing a wafer container. The wafer container has an enclosure portion with at least a top, a bottom, a pair of opposing sides, a back, an open front, and a door to close the open front. The door includes a door chassis with at least a first latching mechanism. The latching mechanism has a rotatable cam member and at least one latching arm. The latching arm has a bifurcate cam follower portion that engages with the periphery of the cam member.
申请公布号 EP1466063(A1) 申请公布日期 2004.10.13
申请号 EP20030703808 申请日期 2003.01.14
申请人 ENTEGRIS, INC. 发明人 EGGUM, SHAWN
分类号 B65D85/86;E05C9/04;H01L21/673;(IPC1-7):E05C19/10 主分类号 B65D85/86
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