PROFILER FOR SUCH ULTRA-SMOOTH SURFACE AS MAGNETIC RECORDING DISK USING POLARIZED BEAM INCIDENT VERTICALLY

摘要

PURPOSE: A profiler for an ultra-smooth surface using a polarized beam incident vertically is provided to compatibly and economically measure the topography of an ultra-smooth surface on a hard disk. CONSTITUTION: A profiler(10) for an ultra-smooth surface using a polarized beam incident vertically comprises a light source(12) generating a beam and polarized linearly, an optical system focusing the beam on the surface to be measured to provide vertically incident beam polarization and including a polarization optical system prepared to make the incident beam have first polarization and a reflected beam(26) have second polarization, and a position detector(30) placed to detect the reflected beam.