SEMICONDUCTOR DEVICE WITH CAPACITOR AND MANUFACTURING METHOD THEREOF TO ENHANCE CAPACITANCE

摘要

PURPOSE: A semiconductor device with a capacitor and a method for manufacturing the same are provided to enhance capacitance while reducing not open contact and to reduce leaning of a storage node. CONSTITUTION: An interlayer dielectric(102) with a contact pad(104) is formed on a semiconductor substrate(100). An etch stop layer and the first sacrificial layer are formed on the contact pad. The first storage node contact hole is formed in the first sacrificial layer. The first storage node(40) of a pad shape is formed in the first storage node contact hole. The second storage node(70) of a cup shape is formed on the first storage node, thereby forming a lower electrode(106) of a capacitor.