METHOD AND DEVICE FOR INSPECTING DEFECT OF TRANSPARENT MATERIAL BY IRRADIATING AND COUPLING LIGHTS

摘要

PURPOSE: A method and a device for inspecting a defect of a transparent material are provided to refer only the signals from a certain partial volume of a transparent material in defect inspection and defect size decision. CONSTITUTION: A method for inspecting a defect of a transparent material comprises the steps of irradiating a definite partial volume(2) of a transparent material using a first radiation source, coupling the lights of a second radiation source(5) into the transparent material to exclusively extend an optical path in the definite partial volume of the transparent material, and inspecting the refraction of the light scattered from a defect and the light of the first radiation source due to the absorption of bright area and/or the defect in the definite partial volume.