发明名称 |
Image sensor with complementary concave and convex lens layers and method for fabrication thereof |
摘要 |
A method for forming an optoelectronic product provides for forming a concave lensing layer registered with a photoactive region within a substrate. The concave lensing layer is formed employing an isotropic etching method. Registered in turn with a concavity with the concave lensing layer is a convex microlens layer formed over the concave lensing layer. The combination of the foregoing lensing layers provides the optoelectronic product with enhanced optical performance.
|
申请公布号 |
US6803250(B1) |
申请公布日期 |
2004.10.12 |
申请号 |
US20030423375 |
申请日期 |
2003.04.24 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD |
发明人 |
YAUNG DUN-NIAN;WU SOU-KUO |
分类号 |
H01L21/00;H01L27/146;H01L31/0216;H01L31/0232;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|