发明名称 Image sensor with complementary concave and convex lens layers and method for fabrication thereof
摘要 A method for forming an optoelectronic product provides for forming a concave lensing layer registered with a photoactive region within a substrate. The concave lensing layer is formed employing an isotropic etching method. Registered in turn with a concavity with the concave lensing layer is a convex microlens layer formed over the concave lensing layer. The combination of the foregoing lensing layers provides the optoelectronic product with enhanced optical performance.
申请公布号 US6803250(B1) 申请公布日期 2004.10.12
申请号 US20030423375 申请日期 2003.04.24
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD 发明人 YAUNG DUN-NIAN;WU SOU-KUO
分类号 H01L21/00;H01L27/146;H01L31/0216;H01L31/0232;(IPC1-7):H01L21/00 主分类号 H01L21/00
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