发明名称 |
Wollaston prism phase-stepping point diffraction interferometer and method |
摘要 |
A Wollaston prism phase-stepping point diffraction interferometer for testing a test optic. The Wollaston prism shears light into reference and signal beams, and provides phase stepping at increased accuracy by translating the Wollaston prism in a lateral direction with respect to the optical path. The reference beam produced by the Wollaston prism is directed through a pinhole of a diaphragm to produce a perfect spherical reference wave. The spherical reference wave is recombined with the signal beam to produce an interference fringe pattern of greater accuracy.
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申请公布号 |
US6804009(B2) |
申请公布日期 |
2004.10.12 |
申请号 |
US20020087482 |
申请日期 |
2002.02.28 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
RUSHFORD MICHAEL C. |
分类号 |
G01B11/06;(IPC1-7):G01B9/02 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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