发明名称 Silicon containing material for patterning polymeric memory element
摘要 The present invention provides a method to fabricate an organic memory device, wherein the fabrication method includes forming a lower electrode, depositing a passive material over the surface of the lower electrode, applying an organic semiconductor material over the passive material, and operatively coupling the an upper electrode to the lower electrode through the organic semiconductor material and the passive material. Patterning of the organic semiconductor material is achieved by depositing a silicon-based resist over the organic semiconductor, irradiating portions of the silicon-based resist and patterning the silicon-based resist to remove the irradiated portions of the silicon-based resist. Thereafter, the exposed organic semiconductor can be patterned, and the non-irradiated silicon-based resist can be stripped to expose the organic semiconductor material that can be employed as a memory cell for single and multi-cell memory devices. A partitioning component can be integrated with the memory device to facilitate stacking memory devices and programming, reading, writing and erasing memory elements.
申请公布号 US6803267(B1) 申请公布日期 2004.10.12
申请号 US20030614484 申请日期 2003.07.07
申请人 ADVANCED MICRO DEVICES, INC. 发明人 SUBRAMANIAN RAMKUMAR;LYONS CHRISTOPHER F.;BUYNOSKI MATTHEW S.;CHEUNG PATRICK K.;HUI ANGELA T.;KHATHURIA ASHOK M.;LOPATIN SERGEY D.;NGO MINH VAN;OGLESBY JANE V.;TONG TERENCE C.;XIE JAMES J.
分类号 H01L27/28;H01L51/40;(IPC1-7):H01L21/336 主分类号 H01L27/28
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