| 发明名称 |
Photoresist compositions comprising blends of photoacid generators |
| 摘要 |
The invention provides new photoresist compositions that contain a resin binder and a blend of photoacid generators. Photoacid generator blends of the invention produce photoacids that differ in acid strength and/or size.
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| 申请公布号 |
US6803169(B2) |
申请公布日期 |
2004.10.12 |
| 申请号 |
US20010788106 |
申请日期 |
2001.02.17 |
| 申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
CAMERON JAMES F.;MORI JAMES MICHAEL;ORSULA GEORGE W.;THACKERAY JAMES W. |
| 分类号 |
H01L21/027;G03F7/004;G03F7/039;(IPC1-7):G03F7/004 |
主分类号 |
H01L21/027 |
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