发明名称 Structure having pores and its manufacturing method
摘要 A structure having pores includes a first layer containing alumina, a second layer that includes at least one of Ti, Zr, Hf, Nb, Ta, Mo, W and Si, and a third layer with electrical conductivity, in this order, wherein the first and second layers have pores.
申请公布号 US6804081(B2) 申请公布日期 2004.10.12
申请号 US20020144257 申请日期 2002.05.10
申请人 CANON KABUSHIKI KAISHA 发明人 DEN TORU;YASUI NOBUHIRO;SAITO TATSUYA
分类号 C25D11/04;C25D11/18;G11B5/74;H01L43/08;(IPC1-7):G11B17/00 主分类号 C25D11/04
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