SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE,申请号AU20030213420-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号	AU2003213420(A1)	申请公布日期	2004.10.11
申请号	AU20030213420	申请日期	2003.03.17
申请人	FUJITSU LIMITED	发明人	MASAOMI YAGUCHI
分类号	C23C16/30;H01L21/28;H01L21/314;H01L21/316;H01L21/318;H01L21/336;H01L29/51;H01L29/78;(IPC1-7):H01L21/318	主分类号	C23C16/30
代理机构		代理人
主权项
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