X-Y STAGE DEVICE TO MOVE OBJECT IN X-AXIAL DIRECTION AND Y-AXIAL DIRECTION WITH HIGH STOP ACCURACY

摘要

PURPOSE: An x-y stage device is provided to obtain the high stop accuracy while reducing expensive components. CONSTITUTION: Two guide rails(110,120) are fixed on a base(100). An Y slider(130) moves through the guide rails by combining with the guide rails. An X slider(140) is combined with the Y slider to move through the Y slider in perpendicularly. The Y slider is moved with separating from the surface of the base by supporting in the guide rails with rolling bearings. The X slider is moved by including the rolling bearing between the Y slider and moved with floating from the surface of the base by including plural static pressure bearings(141¯143). The stop accuracy is improved by a brake device(190).