发明名称 |
FLUORINE-DOPED QUARTZ GLASS ARTICLE AND MANUFACTURING METHODTHEREOF |
摘要 |
A method for manufacturing a fluorine-doped quartz glass article by sintering a porous glass preform moving in a heat zone in an atmosphere of a fluorine gas is disclosed, wherein a fluorine gas process is performed by setting a moving speed of the porous glass preform in the heat zone heated at 1000.degree.C or more in order that L/V is 40 minutes or more, where L is the length (mm) of a heater, and V is the moving speed (mm/min). The temperature of the heat zone may be vitrification temperature. The fluorine gas process may be performed in the heat zone which is at 1000.degree.C or more not to perform a vitrification process, and then the vitrification process maybe performed by increasing the temperature of the heat zone.
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申请公布号 |
CA2463212(A1) |
申请公布日期 |
2004.10.08 |
申请号 |
CA20042463212 |
申请日期 |
2004.04.05 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
MANTOKU, NOBUYASU;ABE, JUN |
分类号 |
C03B37/014;C03C3/06;C03C13/04;(IPC1-7):C03C17/22 |
主分类号 |
C03B37/014 |
代理机构 |
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地址 |
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