METHOD FOR ENLARGING TRAVEL OF PIEZOELECTRIC PZT MATERIAL AND MEMS SWITCH USING THE SAME

摘要

PURPOSE: A method for enlarging a travel of a piezoelectric PZT(Plumbum-Zirconate-Titanate) material and a MEMS switch using the same are provided to form a switching element using the piezoelectric PZT material by enlarging the travel of the piezoelectric PZT material. CONSTITUTION: A piezoelectric PZT material is connected to an electrode in order to perform a turn-on switching operation when electric potential is applied to the piezoelectric PZT material by an actuator or perform a turn-off switching operation when the electric potential is removed from the piezoelectric PZT material. An enlargement device is extended to the electrode by using a lever method. The width of a switching operation is extended when the enlargement device is operated. The lever is installed at a lateral part of the piezoelectric PZT material.