METHOD FOR FORMING TEST PATTERN OF SEMICONDUCTOR DEVICE TO EASILY TEST BRIDGE OF CAPACITOR

摘要

PURPOSE: A method for forming a test pattern of a semiconductor device is provided to easily test bridge of a capacitor by forming the test pattern same to layout of a storage electrode in a main chip. CONSTITUTION: A word line(15) and the first landing plug are formed on a substrate. An interlayer dielectric is formed on the resultant structure. A bit line(19) is formed to overlap the word line. The second landing plug contact hole(30) with line shape is formed vertically to the bit line. The second landing plug(31) is formed between the bit lines. A storage electrode(21) with a line pattern is then formed to connect an active region(13) through the second and first landing plug. A metal line(35) is formed to connect the line pattern.