发明名称 SAWING APPARATUS FOR SEMICONDUCTOR PACKAGE PROCESS AND CONTROLLING METHOD THEREOF
摘要 PURPOSE: A sawing apparatus for a semiconductor package process and a controlling method thereof are provided to perform simultaneously a loading process of a strip and an unloading process of a package by using two chuck plates. CONSTITUTION: A chuck table(23) is installed on a chuck table base. The chuck table is horizontally moved on the chuck table base. Two chuck plates(233a,233b) are rotatably installed on an upper part of the chuck table. A strip is alternately loaded on each upper surface of the chuck plates. A cutting unit(30) is moved according to an operation of the chuck table in order to cut the strip loaded on the chuck plates into individual packages. A strip/package picker is used for performing a process for loading the strip on the chuck plates and an unloading process of the packages.
申请公布号 KR20040085280(A) 申请公布日期 2004.10.08
申请号 KR20030019917 申请日期 2003.03.31
申请人 HANMISEMICONDUCTOR CO., LTD. 发明人 LEE, YONG GU
分类号 H01L21/56;H01L21/78;(IPC1-7):H01L21/78 主分类号 H01L21/56
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