发明名称 |
SAWING APPARATUS FOR SEMICONDUCTOR PACKAGE PROCESS AND CONTROLLING METHOD THEREOF |
摘要 |
PURPOSE: A sawing apparatus for a semiconductor package process and a controlling method thereof are provided to perform simultaneously a loading process of a strip and an unloading process of a package by using two chuck plates. CONSTITUTION: A chuck table(23) is installed on a chuck table base. The chuck table is horizontally moved on the chuck table base. Two chuck plates(233a,233b) are rotatably installed on an upper part of the chuck table. A strip is alternately loaded on each upper surface of the chuck plates. A cutting unit(30) is moved according to an operation of the chuck table in order to cut the strip loaded on the chuck plates into individual packages. A strip/package picker is used for performing a process for loading the strip on the chuck plates and an unloading process of the packages.
|
申请公布号 |
KR20040085280(A) |
申请公布日期 |
2004.10.08 |
申请号 |
KR20030019917 |
申请日期 |
2003.03.31 |
申请人 |
HANMISEMICONDUCTOR CO., LTD. |
发明人 |
LEE, YONG GU |
分类号 |
H01L21/56;H01L21/78;(IPC1-7):H01L21/78 |
主分类号 |
H01L21/56 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|