| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of being unable to reduce weight and the size of a vacuum pump as a result of requiring to constitute the vacuum pump of a highly corrosion resisting material for exhausting strongly reactive gas in a vacuum processing system for performing plasma oxidation. SOLUTION: A member for constituting the vacuum pump is composed of aluminum or an aluminum alloy. A dense and flat aluminum oxide coating film is formed by applying plasma oxidation processing and oxidation processing by an oxygen radical to a member surface, and the highly corrosion resisting vacuum pump is constituted thereby. COPYRIGHT: (C)2005,JPO&NCIPI
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