MEMS MICROGENERATOR CELL AND MICROGENERATOR CELL ARRAY

摘要

A microelectrical mechanical system (MEMS) microgenerator cell (3) and array is disclosed. The MEMS microgenerator cell (3) of the present invention is effective in the conversion of thermal energy to electrical energy. In accordance with the present invention, an explosive material is loaded into a chamber (1). A diaphragm (15) seals the chamber, containing a plasma material. The explosive material is subsequently heated to its ignition temperature thereby raising the pressure in the chamber (1) until the diaphragm (15) ruptures. The rupture of the diaphragm (15) results in the flow of plasma out of the chamber (1). Upon exiting the chamber (1), the plasma is forced to flow between two parallel rectangular electrodes (20). A magnetic field is applied in a direction orthogonal to both the plasma flow and the electrodes (20), thereby generating an electromagnetic field sufficient to a power source for MEMS devices.