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发明名称
Lagereinrichtung
摘要
申请公布号
DE10295549(D2)
申请公布日期
2004.10.07
申请号
DE20021095549
申请日期
2002.11.21
申请人
ORTNER C.L.S. GMBH
发明人
BUDACH, KARSTEN;ESSER, HEINZ MARTIN;JARNIG, HUBERT
分类号
H01L21/00;H01L21/677;(IPC1-7):H01L21/00
主分类号
H01L21/00
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代理人
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