| 摘要 |
PROBLEM TO BE SOLVED: To provide a drive mechanism having high rigidity capable of inching regulation of a mirror or a member supporting the mirror in six axial directions in an EUV aligner, or the like. SOLUTION: In the drive mechanism, three integrated planar three joint or four joint link mechanisms are disposed between a movable section and a fixed section through bearings each having a degree of freedom in rotation. COPYRIGHT: (C)2005,JPO&NCIPI |
