| 发明名称 |
ORGANIC-INORGANIC COMPOSITE AND ITS MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE USING THE SAME |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-permittivity material whose flexibility is high. SOLUTION: The organic-inorganic composite contains a crosslinking structure by metal-oxygen bonding and a carbon atom that is covalently-bonded to the crosslinking structure, and has a continuous pore structure where voids are continuously connected. COPYRIGHT: (C)2005,JPO&NCIPI |
| 申请公布号 |
JP2004281785(A) |
申请公布日期 |
2004.10.07 |
| 申请号 |
JP20030072237 |
申请日期 |
2003.03.17 |
| 申请人 |
SEKISUI CHEM CO LTD |
发明人 |
SUGIMOTO TOSHIYA;MIYAMA TOSHIHITO;NOMURA SHIGEKI |
| 分类号 |
C08G79/00;C08G77/48;H01L21/312;H01L21/768;H01L23/522;(IPC1-7):H01L21/312 |
主分类号 |
C08G79/00 |
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