| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid material feeder which is able to feed a high-quality material, is made proof against the contamination of the discharged liquid with air bubbles, and is resistant to liquid leak. SOLUTION: The liquid substance feeder is provided with a body 1 having the primary-side passage 2 and the secondary-side passage 6 and a valve 3 that controls the flow rate of the liquid material flowing from the primary-side passage 2 to the secondary-side passage 6 and is characterized in that the body 1 has an integrally formed cylindrical protrusion 1a being situated on the side opposite to the tapered surface 5 and being an extension from the secondary-side passage 6, and the liquid material is discharged from the cylindrical protrusion 1a. The valve 3 is provided with a poppet 3a having a conical tapered surface ts capable of intimate contact with the tapered surface 5. COPYRIGHT: (C)2005,JPO&NCIPI
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