FLUORESCENT MATERIAL THIN FILM AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a fluorescent material thin film formed by doping a rare earth element ion as a light-emitting center into an Al2O3thin film as a mother crystal, that is excellent in controlling the composition and the concentration of the light-emitting center, and has a good color purity and a high brightness. SOLUTION: This fluorescent material thin film comprises an Al2O3thin film as a mother crystal laminated on a heated substrate, and a CeO2thin film as a rare earth element oxide for a light-emitting center laminated thereon. It has a structure in which the light-emitting center is present as a component of a solid solution in the mother crystal of the Al2O3thin film. The Al2O3and CeO2thin films are formed by sputtering. The fluorescent material thin film prepared in an atmosphere of a gas mixture of argon and hydrogen emits a very strong blue light. COPYRIGHT: (C)2005,JPO&NCIPI