| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign substance interfusion inspection method and an apparatus used for it which inexpensively detect nonmetal foreign substances for which there have not been effective inspection method previously. SOLUTION: In the foreign substance interfusion inspection method an inspection object is irradiated with an electromagnetic wave, having a particular excitation wavelength comprising ultraviolet rays or a visible light, detects a particular fluorescence wavelength of the inspected object irradiated with the electromagnetic wave, by using a filter for detecting the particular fluorescence wavelength; obtains a first fluorescence image on a first fluorescence condition determined by the electromagnetic wave having the particular excitation wavelength and the particular fluorescence wavelength; and generates a signal for determining the existence of foreign substance interfusion, by implementing a process for combining at least the first fluorescence image and a second fluorescence image, after the second fluorescence image was obtained on a second fluorescence condition determined by changing at least one of the electromagnetic wave having the particular excitation wavelength and the particular fluorescence wavelength, in comparison with the first fluorescence condition. COPYRIGHT: (C)2005,JPO&NCIPI
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