| 摘要 |
PROBLEM TO BE SOLVED: To provide a screen printing metal mask, with which the printed film of printing paste having a high thickness accuracy and a high dimensional accuracy is obtained and the coming off of paste at a paste printing is favorable, and its easy manufacturing method. SOLUTION: In this metal mask, opening parts are provided by irradiating laser over a thin base material plate made of austenitic stainless steel and a reformed layer made of a compound of the austenitic stainless steel and fluorine is provided on the surface of the thin base material plate including on the inner wall surfaces of the opening parts. Further, the reformed layer is formed by washing the surface of the thin base material plate with a processing liquid mainly made of acid ammonium fluoride and nitric acid. COPYRIGHT: (C)2005,JPO&NCIPI
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