SPECIMEN MACHINING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an FIB (Focused Ion Beam) machining apparatus capable of optimizing the machining order of machining positions scattered on a specimen to be machined. SOLUTION: The FIB machining needing a plurality of processes is performed by optimizing the machining order. Thus, the shortening of a stage moving distance, the reduction of the number of times of stage rotation and the reduction of the number of times of a mechanical change for selecting kinds of machining are realized to shorten the total machining time and improve the machining precision. COPYRIGHT: (C)2005,JPO&NCIPI