发明名称 ELECTROCHEMICAL ANALYTICAL APPARATUS AND METHOD OF USING THE SAME
摘要 The present invention relates to an electrochemical analytical apparatus for analyzing an electrochemical deposition solution, comprising a testing electrode (20), and a temperature detector (24) attached thereto for monitoring temperature of said testing electrode (20). Preferably, such temperature detector (24) is a resistance temperature detector.
申请公布号 WO2004023094(A3) 申请公布日期 2004.10.07
申请号 WO2003US27566 申请日期 2003.09.03
申请人 ADVANCED TECHNOLOGY MATERIALS, INC. 发明人 KING, MACKENZIE;STAPLES, JOHN, W.;EVANS, JOSEPH, W.;CLARK, DANIEL, O.;ROBERTSON, PETER, M.;CHATTERTON, THOMAS, B.;HARTFORD, THOMAS
分类号 G01N27/28 主分类号 G01N27/28
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