| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize a high grade device constitution by reducing effects to be imparted to the film quality of a piezoelectric body thin film in a surface acoustic wave device composed by forming the piezoelectric body thin film on a dielectric substrate via a short-circuit electrode (a base electrode). <P>SOLUTION: A laminated structure of a base electrode layer 102 and the piezoelectric body thin film 103 is provided on the dielectric substrate 101 in the surface acoustic wave device 100. The surface acoustic wave device 100 is provided with an electrode 104 inducing a surface acoustic wave to the piezoelectric body thin film. The base electrode layer has a function to reduce potential variations on the interface of the piezoelectric body thin film, and the base electrode layer is composed of a semiconductor. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
