| 摘要 |
PROBLEM TO BE SOLVED: To improve operating efficiency by reducing frequency of exchange of the members constituting a slit in an ion implanter to limit the width of an ion beam. SOLUTION: The slit part 25 is composed of a pair of carbon plate 31, the slit 40 formed between the pair of carbon plates 31, a support axis 32, an actuator 33, a transfer control means 34, and a rotation control means 38. The pair of the carbon plates 31 are translocated or rotated via the support axis 32 by controlling the actuator 33 by means of the transfer control means 34 or the rotation control means 38. COPYRIGHT: (C)2005,JPO&NCIPI
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