发明名称 |
Method for automatic mask tool translation |
摘要 |
A method for translating mask tooling information comprises the steps of: receiving a plurality of input mask tooling forms for fabricating a wafer, at least two of the plurality of input masking tool forms having respectively different sequences of layers; forming a template having a sequence of layers formed by the union of the different sequences of layers; and translating information from each of the input mask tooling forms to fit the template.
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申请公布号 |
US2004199895(A1) |
申请公布日期 |
2004.10.07 |
申请号 |
US20030404484 |
申请日期 |
2003.04.01 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
HONG HSIN-MING;TSAO PIAO-CHUO;FENG SHU-LING;TSENG YI-HONG |
分类号 |
G06F17/50;(IPC1-7):G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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