SUBSTANCE IDENTIFICATION SYSTEM

摘要

PROBLEM TO BE SOLVED: To simplify manual work carried out conventionally by a measuring person to identify a substance precisely and quickly.

SOLUTION: An electron beam apparatus has an electron beam diffraction image analyzing part 3 for calculating lattice spacing based on a diffraction image taken in by a TV camera 10 for observing the electron beam diffraction image, an EDX analyzing part 2 connected to an EDX detector 9 to find a substance composition, and a substance identifying part 4 provided with a database for retrieval for identifying the substance and a database retrieving function. The substance identifying part 4 retrieves the database for the retrieval to identify the substance, based on a lattice spacing data transmitted from the electron beam diffraction image analyzing part 3, and an element data transmitted from the EDX analyzing part 2.

COPYRIGHT: (C)2005,JPO&NCIPI