| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas storage, measurement and distribution system for storing, measuring and distributing gas consisting of hydride and halide, and conquering disadvantages of a method disclosed in known technology. SOLUTION: In gas such as hydride and halide, an adsorption-desorption device (102) of compounds of group V organic metals, and a method for storage, measurement and distribution, measurement and distribution are selectively performed by the differential pressure desportion from adsorption material of the adsorbed gas. The adsorption material preferably loses the concentration of traces to effectively decompose the adsorbed gas in the device (102), for example, the concentration of the transition metal consisting of metal and oxide. COPYRIGHT: (C)2005,JPO&NCIPI
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